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Proceedings Paper

Step height determination by a focused Gaussian beam
Author(s): Danny Levy; Joseph Shamir; Yehuda Leviatan
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Paper Abstract

The method of moments is used to investigate the interaction of a well focused laser beam with a step of a conducting surface. The two dimensional problem is solved by using a model of fictitious current filaments, while three-dimensional problems are treated by using a model of fictitious dipoles as the sources of the scattered field. Computer simulations indicate a difference between the two polarization components (TE,TM), but these differences are too small for practical measurements. The scattered field distribution is found to be highly dependent on the step height relative to the observation plane and on its position relative to the beam waist. Thus measurements of the intensity distribution in the observation plane can provide information about these parameters with high sensitivity. Experimental investigation confirms that step height, including its sign, i.e., hills or pits, as well as its position can be determined with an accuracy of about (lambda) /100.

Paper Details

Date Published: 6 June 1995
PDF: 22 pages
Proc. SPIE 2426, 9th Meeting on Optical Engineering in Israel, (6 June 1995); doi: 10.1117/12.211186
Show Author Affiliations
Danny Levy, Technion--Israel Institute of Technology (Israel)
Joseph Shamir, Technion--Israel Institute of Technology (Israel)
Yehuda Leviatan, Technion--Israel Institute of Technology (Israel)

Published in SPIE Proceedings Vol. 2426:
9th Meeting on Optical Engineering in Israel
Itzhak Shladov; Yitzhak Wiessman; Natan Kopeika, Editor(s)

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