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Proceedings Paper

CMOS-compatible surface-micromachined pressure sensor for aqueous ultrasonic application
Author(s): William P. Eaton; James H. Smith
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Paper Abstract

A surface micromachined pressure sensor array is under development at the Integrated Micromechanics, Microsensors, and CMOS Technologies organization at Sandia National Laboratories. This array is designed to sense absolute pressures from ambient pressure to 650 psia with frequency responses from DC to 2 MHz. The sensor is based upon a sealed, deformable, circular LPCVD silicon nitride diaphragm. Absolute pressure is determined from diaphragm deflection, which is sensed with low- stress, micromechanical, LPCVD polysilicon piezoresistors. All materials and processes used for sensor fabrication are CMOS compatible, and are part of Sandia's ongoing effort of CMOS integration with MicroElectroMechanical Systems (MEMS). Test results of individual sensors are presented along with process issues involving the release etch and metal step coverage.

Paper Details

Date Published: 26 May 1995
PDF: 8 pages
Proc. SPIE 2448, Smart Structures and Materials 1995: Smart Electronics, (26 May 1995); doi: 10.1117/12.210470
Show Author Affiliations
William P. Eaton, Univ. of New Mexico and Sandia National Labs. (United States)
James H. Smith, Sandia National Labs. (United States)

Published in SPIE Proceedings Vol. 2448:
Smart Structures and Materials 1995: Smart Electronics
Vijay K. Varadan, Editor(s)

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