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Proceedings Paper

Smart MEMS for smart structures
Author(s): Jeffrey N. Schoess; J. David Zook
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Paper Abstract

Future advanced fixed and rotary-wing aircraft, launch vehicles, and spacecraft will incorporate smart MEMS devices to monitor structural integrity and manage overall structural health. These smart structures will be capable of assessing vehicle structural damage in real time and ultimately reconfiguring the vehicle flight control to prevent catastrophic failures. This paper describes an overview of Honeywell's MEM technology for new and aging aircraft applications to assess preflight readiness, in- flight structural integrity, and postflight time-based maintenance. Honeywell's MEMS approach combines silicon micromachining, free-space optical waveguides, high-speed optical interconnects, and supervisory sensor management to monitor structural integrity and health. A unique second-generation polysilicon resonance microbeam sensor is described. It incorporates a micron-level vacuum-encapsulated microbeam to optically sense structural-integrity parameters such as acoustic- mission, strain, and to optically power the sensor pickoff. Its principle of operation and significant payoffs and benefits are summarized.

Paper Details

Date Published: 26 May 1995
PDF: 5 pages
Proc. SPIE 2448, Smart Structures and Materials 1995: Smart Electronics, (26 May 1995); doi: 10.1117/12.210454
Show Author Affiliations
Jeffrey N. Schoess, Honeywell Technology Ctr. (United States)
J. David Zook, Honeywell Technology Ctr. (United States)

Published in SPIE Proceedings Vol. 2448:
Smart Structures and Materials 1995: Smart Electronics
Vijay K. Varadan, Editor(s)

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