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Proceedings Paper

Lithography and the future of Moore's law
Author(s): Gordon E. Moore
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Paper Abstract

The definition of `Moore's Law' has come to refer to almost anything related to the semiconductor industry that when plotted on semi-log paper approximates a straight line. I hesitate to review its origins and by doing so restrict its definition. However, this paper is a review of the history and past performance relative to predictions and shows where the advances have come from. I will leave the future performance up to you. Certainly continuing on the same slope doesn't get any easier. It presents a difficult challenge to the industry.

Paper Details

Date Published: 9 June 1995
PDF: 16 pages
Proc. SPIE 2438, Advances in Resist Technology and Processing XII, (9 June 1995); doi: 10.1117/12.210341
Show Author Affiliations
Gordon E. Moore, Intel Corp. (United States)

Published in SPIE Proceedings Vol. 2438:
Advances in Resist Technology and Processing XII
Robert D. Allen, Editor(s)

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