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Proceedings Paper

Low cost of ownership KrF excimer laser using a novel pulse power and chamber configuration
Author(s): William N. Partlo; Richard L. Sandstrom; Igor V. Fomenkov; Palash P. Das
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Paper Abstract

A KrF excimer laser using an all solid state Pulse Power Modulator (PPM) has been studied. This PPM configuration replaces the commonly used thyratron switch with a Silicon Controlled Rectifier (SCR) switch combined with a pulse compression-voltage multiplication circuit. Use of this PPM has extended the useful chamber life of a line-narrowed KrF excimer laser from 1.5 billion to 2.5 billion pulses. Broadband KrF laser performance, optimized for mirror based scanner systems, has also been investigated. A minimum broadband chamber life of 5 billion pulses has been demonstrated with this solid state PPM. While a thyratron-based PPM exhibits an expected lifetime of 3 billion pulses, the solid state PPM used in these experiments has been operated for greater than 6 billion pulses without any decrease in performance. Since 72% of the replacement parts cost for the ELS-4000D line-narrowed excimer laser is due to periodic chamber and PPM replacement, significant cost of ownership reduction is realized by extending the lifetime of the chamber and the PPM.

Paper Details

Date Published: 26 May 1995
PDF: 11 pages
Proc. SPIE 2440, Optical/Laser Microlithography VIII, (26 May 1995); doi: 10.1117/12.209294
Show Author Affiliations
William N. Partlo, Cymer Laser Technologies (United States)
Richard L. Sandstrom, Cymer Laser Technologies (United States)
Igor V. Fomenkov, Cymer Laser Technologies (United States)
Palash P. Das, Cymer Laser Technologies (United States)

Published in SPIE Proceedings Vol. 2440:
Optical/Laser Microlithography VIII
Timothy A. Brunner, Editor(s)

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