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Proceedings Paper

Direct measurement of optical constants of metals from a KrF excimer using polarization methods
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Paper Abstract

A simple null modulation-polarization method of measuring optical constants of metals has been adapted for operation with a KrF 248 nm excimer laser. The approach requires only 3 optical components to extract the real and imaginary parts of the index of refraction (n,k). Experimental results will show good agreement to reference values for several metals (Cr, Au, Al) and Si.

Paper Details

Date Published: 22 May 1995
PDF: 3 pages
Proc. SPIE 2439, Integrated Circuit Metrology, Inspection, and Process Control IX, (22 May 1995); doi: 10.1117/12.209235
Show Author Affiliations
Suleyman Turgut, Rochester Institute of Technology (United States)
Bruce W. Smith, Rochester Institute of Technology (United States)


Published in SPIE Proceedings Vol. 2439:
Integrated Circuit Metrology, Inspection, and Process Control IX
Marylyn Hoy Bennett, Editor(s)

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