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Proceedings Paper

Effect of numerical aperture and partial coherence on i-line swing curve amplitude at sub-half-micrometer resolution
Author(s): Brian Martin; Graham G. Arthur
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Paper Abstract

'Swing curves' derived from the modelling program SOLID are presented for a typical conventional i-line resist. At a constant sub-half-micron feature size, results illustrate the effect of varying stepper lens conditions on 'swing curve' amplitude and indicate that, whilst initially defined by reflectivities, resist thickness and resist absorption coefficient, it increases as aerial image peak intensity decreases. 'Swing curves' are drawn in terms of exposure-to-size vs resist thickness which has the advantage of always producing complete plots.

Paper Details

Date Published: 22 May 1995
PDF: 9 pages
Proc. SPIE 2439, Integrated Circuit Metrology, Inspection, and Process Control IX, (22 May 1995); doi: 10.1117/12.209232
Show Author Affiliations
Brian Martin, GEC Plessey Semiconductors Ltd. (United Kingdom)
Graham G. Arthur, Rutherford Appleton Lab. (United Kingdom)

Published in SPIE Proceedings Vol. 2439:
Integrated Circuit Metrology, Inspection, and Process Control IX
Marylyn Hoy Bennett, Editor(s)

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