Share Email Print

Proceedings Paper

Mass-transport fabrication of large-numerical-aperture micro-optics
Author(s): Zong-Long Liau
Format Member Price Non-Member Price
PDF $17.00 $21.00

Paper Abstract

A promising approach for efficient microlenses and compact diode laser systems is reviewed. Development of one-step etching of the lens preform and effective wafer protection in mass transport has led to a considerably simplified process and increased reproducibility. Anamorphic microlenses have been fabricated and demonstrate capability for simple compact optics for tapered high-power diode lasers, with coupling of 347 mW into a single-mode fiber. GaAs microlenses have been developed as a first step toward monolithic laser/lens integration. Simple hybrid integration has been demonstrated with a direct mounting of microlenses on packaged lasers.

Paper Details

Date Published: 12 May 1995
PDF: 8 pages
Proc. SPIE 2383, Micro-Optics/Micromechanics and Laser Scanning and Shaping, (12 May 1995); doi: 10.1117/12.209033
Show Author Affiliations
Zong-Long Liau, MIT Lincoln Lab. (United States)

Published in SPIE Proceedings Vol. 2383:
Micro-Optics/Micromechanics and Laser Scanning and Shaping
M. Edward Motamedi; Leo Beiser, Editor(s)

© SPIE. Terms of Use
Back to Top