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Proceedings Paper

Electric-field assisted assembly of core-shell nanoparticle arrays for contact hole patterning
Author(s): Lan Lin; Xuexue Guo; Theresa S. Mayer
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Paper Abstract

In this paper, we investigate an electric-field assisted assembly approach to create dense arrays of contact hole patterns with complex feature geometries. This hybrid strategy uses a spatially varying dielectrophoretic (DEP) force created by lithographically defined guiding features to assemble dense arrays of nanoparticles within the features, thereby replicating features within the starting pattern. For close-packed particle arrays, the half- and full-pitch of the contact hole array is defined by the starting nanoparticle core and shell diameter.

Paper Details

Date Published: 19 March 2015
PDF: 6 pages
Proc. SPIE 9423, Alternative Lithographic Technologies VII, 94231U (19 March 2015); doi: 10.1117/12.2087547
Show Author Affiliations
Lan Lin, The Pennsylvania State Univ. (United States)
Xuexue Guo, The Pennsylvania State Univ. (United States)
Theresa S. Mayer, The Pennsylvania State Univ. (United States)

Published in SPIE Proceedings Vol. 9423:
Alternative Lithographic Technologies VII
Douglas J. Resnick; Christopher Bencher, Editor(s)

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