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Proceedings Paper

Implementation of real-time displacement precision measurement technology for the sinusoidal phase-shifting laser self-mixing interferometer
Author(s): Qiang Liu; Ming Wang; Yufeng Tao; Junbao Chen; Hui Hao; Dongmei Guo
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Paper Abstract

An advanced sinusoidal phase-shifting technique and a time-domain phase demodulation method were used to improve the measurement accuracy and realize the real-time measurement speed of the laser self-mixing interferometer in a large range of displacement. An electro-optic crystal modulator (EOM) was used to realize the sinusoidal phase-shifting on the laser beam in the external cavity. The interference signal was demodulated using a time-domain phase demodulation method. The speed requirement could be met by combining the two together in a wide range of displacement measurement processes together with the real-time measurement requirement as an interferometer at the same time. It was experimentally verified that the displacement measurement precision of a sinusoidal phase-shifting laser self-mixing interferometer could reach less than 0.5 μm in the hundred mm large-scale displacement measuring process. In addition, the factors affecting the interferometer’s measurement speed in the real-time displacement measurement process is analyzed and the maximum speed of our system was obtained as well. Keywords: self-mixing interference; phase modulation; time-domain phase demodulation

Paper Details

Date Published: 6 March 2015
PDF: 8 pages
Proc. SPIE 9446, Ninth International Symposium on Precision Engineering Measurement and Instrumentation, 944607 (6 March 2015); doi: 10.1117/12.2083897
Show Author Affiliations
Qiang Liu, Nanjing Normal Univ. (China)
Ming Wang, Nanjing Normal Univ. (China)
Yufeng Tao, Nanjing Normal Univ. (China)
Junbao Chen, Nanjing Normal Univ. (China)
Hui Hao, Nanjing Normal Univ. (China)
Dongmei Guo, Nanjing Normal Univ. (China)

Published in SPIE Proceedings Vol. 9446:
Ninth International Symposium on Precision Engineering Measurement and Instrumentation
Junning Cui; Jiubin Tan; Xianfang Wen, Editor(s)

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