We present the design and demonstration of a unique and novel detector for electron microscopy based on microelectromechanical systems (MEMS) technology. The detector is optimized for transmission electron backscatter diffraction, or more specifically for transmission Kikuchi diffraction, and will allow this new analytic tool to realize its full potential. In addition, this single detector is capable of simultaneous acquisition of bright field and dark field images in scanning electron microscopy and transmission electron microscopy and may replace a number of the single-purpose detectors presently used in these devices.

Date Published: 10 March 2015
PDF: 13 pages
Proc. SPIE 9376, Emerging Digital Micromirror Device Based Systems and Applications VII, 93760K (10 March 2015); doi: 10.1117/12.2083520

Published in SPIE Proceedings Vol. 9376:
Emerging Digital Micromirror Device Based Systems and Applications VII
Michael R. Douglass; Philip S. King; Benjamin L. Lee, Editor(s)