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Proceedings Paper

Precision 3D surface measurement of step-structures using mode-locked femtosecond pulses
Author(s): Young-Jin Kim; Minah Choi; Keunwoo Lee; Heesuk Jang; Jiyong Park; Seung-Woo Kim
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Paper Abstract

Fast, precise 3-D measurement of step-structures fabricated on microelectronic products is essential for quality assurance of semiconductor, flat panel display and photovoltaic products. Optical interferometers have long been used, but not that wide-spread for step-structures due to their phase ambiguity or low spatial coherence. Femtosecond pulse lasers can provide novel possibilities to optical profilometry both in the time and the frequency domain. In the time domain, step-surfaces can be measured over wide area by exploiting low temporal but high spatial coherence of femtosecond pulses; in the frequency domain, multi-wavelength interferometry permits the absolute measurement over the discontinued surface profiles while maintaining the sub-wavelength measurement precision.

Paper Details

Date Published: 19 February 2015
PDF: 6 pages
Proc. SPIE 9449, The International Conference on Photonics and Optical Engineering (icPOE 2014), 94493D (19 February 2015); doi: 10.1117/12.2083260
Show Author Affiliations
Young-Jin Kim, KAIST (Korea, Republic of)
Nanyang Technological Univ. (Singapore)
Minah Choi, KAIST (Korea, Republic of)
Keunwoo Lee, KAIST (Korea, Republic of)
Heesuk Jang, KAIST (Korea, Republic of)
Jiyong Park, KAIST (Korea, Republic of)
Seung-Woo Kim, KAIST (Korea, Republic of)

Published in SPIE Proceedings Vol. 9449:
The International Conference on Photonics and Optical Engineering (icPOE 2014)
Ailing Tian; Anand Asundi; Weiguo Liu; Chunmin Zhang, Editor(s)

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