Lateral shearing interference detection is a economically efficient method which is used to the online testing process of aspheric surface. Whereas, when shear plate is used in lateral shearing interference to detect large aperture aspherical surface, the real moving shear plate can produce shearing error, which brings error into the two-dimensional wavefront reconstruction of aspheric surface. So, for shearing error, Zernike polynomial fitting method is used to study shearing displacement error on the influence of two-dimensional wavefront information reconstruction by computer simulation. For the same measured non-spherical surface, different shearing displacement error influences on the precision of wavefront reconstruction are compared by computer simulation，and finally build the corresponding relations between wave information integrity and shearing displacement error

Date Published: 19 February 2015
PDF: 7 pages
Proc. SPIE 9449, The International Conference on Photonics and Optical Engineering (icPOE 2014), 94493C (19 February 2015); doi: 10.1117/12.2083156

Published in SPIE Proceedings Vol. 9449:
The International Conference on Photonics and Optical Engineering (icPOE 2014)
Ailing Tian; Anand Asundi; Weiguo Liu; Chunmin Zhang, Editor(s)