We report corrugated narrow-ridge interband cascade lasers emitting at λ ≈ 3.5 mm that have been fabricated using CH₄/Cl₂- and BCl3-based inductively coupled plasma reactive ion etch processes, with largely similar results from both types of etches. The highest brightness figure of merit was obtained at intermediate ridge width (28 mm), for which the maximum cw output power at T = 25 °C was 522 mW and the corresponding wallplug efficiency and beam quality factor were 10.3% and M² = 3.1, respectively. The high output power may be attributed to a 7-stage design that employs thicker separate confinement layers for lower internal loss.

Date Published: 8 February 2015
PDF: 9 pages
Proc. SPIE 9370, Quantum Sensing and Nanophotonic Devices XII, 937029 (8 February 2015); doi: 10.1117/12.2081929

Published in SPIE Proceedings Vol. 9370:
Quantum Sensing and Nanophotonic Devices XII
Manijeh Razeghi; Eric Tournié; Gail J. Brown, Editor(s)