In this paper, mechanical resonant frequencies of a nanoelectromechanical systems (NEMS) device are tuned by light, in which optical spring effect plays a role. A NEMS spring mechanism with multi-degree of freedom (DOF) is adopted here. Double-coupled nanobeam photonic crystal cavities (PCCs) are utilized to pump the optical spring effect. One of the PCCs is fixed, while the other is driven by the NEMS mechanism. We investigate the shift of the mechanism’s firstorder in-plane translational (I1) resonance mode tuned by the incident laser wavelengths across the fourth-order even (TE_e,4) and odd (TE_o,4) modes of the coupled cavities. It shows a nonlinear relationship between the I1 mechanical frequency and the laser wavelength. We also investigate the frequency of the third-order torsional (T3) mode versus the wavelengths across the same cavity TE_e,4 mode and it shows a weaker torsional optical spring effect.

Date Published: 27 February 2015
PDF: 6 pages
Proc. SPIE 9375, MOEMS and Miniaturized Systems XIV, 93750I (27 February 2015); doi: 10.1117/12.2081123

Published in SPIE Proceedings Vol. 9375:
MOEMS and Miniaturized Systems XIV
Wibool Piyawattanametha; Yong-Hwa Park, Editor(s)