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Proceedings Paper

Tuning mechanical resonant frequencies of nanoelectromechanical systems with light
Author(s): Feng Tian; Guangya Zhou; Fook Siong Chau; Jie Deng
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Paper Abstract

In this paper, mechanical resonant frequencies of a nanoelectromechanical systems (NEMS) device are tuned by light, in which optical spring effect plays a role. A NEMS spring mechanism with multi-degree of freedom (DOF) is adopted here. Double-coupled nanobeam photonic crystal cavities (PCCs) are utilized to pump the optical spring effect. One of the PCCs is fixed, while the other is driven by the NEMS mechanism. We investigate the shift of the mechanism’s firstorder in-plane translational (I1) resonance mode tuned by the incident laser wavelengths across the fourth-order even (TEe,4) and odd (TEo,4) modes of the coupled cavities. It shows a nonlinear relationship between the I1 mechanical frequency and the laser wavelength. We also investigate the frequency of the third-order torsional (T3) mode versus the wavelengths across the same cavity TEe,4 mode and it shows a weaker torsional optical spring effect.

Paper Details

Date Published: 27 February 2015
PDF: 6 pages
Proc. SPIE 9375, MOEMS and Miniaturized Systems XIV, 93750I (27 February 2015); doi: 10.1117/12.2081123
Show Author Affiliations
Feng Tian, National Univ. of Singapore (Singapore)
Guangya Zhou, National Univ. of Singapore (Singapore)
Fook Siong Chau, National Univ. of Singapore (Singapore)
Jie Deng, A*STAR Institute of Materials Research and Engineering (Singapore)

Published in SPIE Proceedings Vol. 9375:
MOEMS and Miniaturized Systems XIV
Wibool Piyawattanametha; Yong-Hwa Park, Editor(s)

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