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Proceedings Paper

Silicon-PDMS optofluidic integration
Author(s): Genni Testa; Gianluca Persichetti; Pasqualina M. Sarro; Romeo Bernini
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Paper Abstract

In this work we show that integrated Hybrid Silicon-PDMS Antiresonant Reflecting Optical Waveguide (H-ARROW) can be applied for the realization of optofluidic devices. H-ARROW is constituted by the optofluidic channel of a conventional ARROW, sealed with a thin PDMS layer. This layout simplifies the integration of microfluidic parts to manipulate liquid samples, which can be easily fabricated in the PDMS layer. Hybrid ARROWs have been fabricated and used in order to design complex devices like an integrated hybrid liquid core optofluidic ring resonator (h-LCORR) and a hybrid optofluidic platform for fluorescence measurements.

Paper Details

Date Published: 27 February 2015
PDF: 7 pages
Proc. SPIE 9367, Silicon Photonics X, 936718 (27 February 2015); doi: 10.1117/12.2080859
Show Author Affiliations
Genni Testa, Istituto per il Rilevamento Elettromagnetico dell'Ambiente, CNR (Italy)
Gianluca Persichetti, Istituto per il Rilevamento Elettromagnetico dell'Ambiente, CNR (Italy)
Pasqualina M. Sarro, Technische Univ. Delft (Netherlands)
Romeo Bernini, Istituto per il Rilevamento Elettromagnetico dell'Ambiente, CNR (Italy)

Published in SPIE Proceedings Vol. 9367:
Silicon Photonics X
Graham T. Reed; Michael R. Watts, Editor(s)

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