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Proceedings Paper

Compliant heterogeneous assemblies of micro-VCSELs as a new materials platform for integrated optoelectronics
Author(s): Dongseok Kang; Sung-Min Lee; Anthony Kwong; Jongseung Yoon
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Paper Abstract

Despite many unique advantages, vertical cavity surface emitting lasers (VCSELs) have been available mostly on rigid, planar wafers over restricted areas, thereby limiting their usage for applications that can benefit from large-scale, programmable assemblies, hybrid integration with dissimilar materials and devices, or mechanically flexible constructions. Here, materials design and fabrication strategies that address these limitations of conventional VCSELs are presented. Specialized design of epitaxial materials and etching processes, together with printing-based deterministic assemblies and substrate thermal engineering, enabled defect-free release of microscale VCSELs and their device- and circuit-level implementation on non-native, flexible substrates with performance comparable to devices on the growth substrate.

Paper Details

Date Published: 4 March 2015
PDF: 5 pages
Proc. SPIE 9381, Vertical-Cavity Surface-Emitting Lasers XIX, 93810S (4 March 2015); doi: 10.1117/12.2080677
Show Author Affiliations
Dongseok Kang, The Univ. of Southern California (United States)
Sung-Min Lee, The Univ. of Southern California (United States)
Anthony Kwong, The Univ. of Southern California (United States)
Jongseung Yoon, The Univ. of Southern California (United States)

Published in SPIE Proceedings Vol. 9381:
Vertical-Cavity Surface-Emitting Lasers XIX
Chun Lei; Kent D. Choquette, Editor(s)

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