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Proceedings Paper

Dynamics of ZnO nanoparticles formed in the high-pressure phase during growth of ZnO nanocrystals
Author(s): D. Nakamura; T. Shimogaki; S. Takao; S. Nakao; K. Harada; M. Higashihata; T. Okada
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Paper Abstract

The dynamics of zinc oxide (ZnO) nanoparticles formed in Ar gas of 200 Torr by laser ablation are visualized by ultraviolet Rayleigh scattering imaging. The time-resolved imaging of the ZnO nanoparticles are presented for several conditions of single-pulse ablation and 10 Hz ablation at room temperature. Scattering light from the nanoparticles appeared at 1-2 ms after ablation, and the spatial distribution was a mushroom like swirling cloud. The cloud propagates forward about 2.6 m/s without lateral expansion. In addition, nanoparticle distribution at a substrate heating condition, which is growth condition of ZnO nanocrystals is investigated. The nanoparticles under heating condition formed almost the same spatial distribution as that of room temperature and their speed was increased to 3.2 m/s at 750 °C.

Paper Details

Date Published: 4 March 2015
PDF: 7 pages
Proc. SPIE 9350, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XX, 93500X (4 March 2015); doi: 10.1117/12.2080503
Show Author Affiliations
D. Nakamura, Kyushu Univ. (Japan)
T. Shimogaki, Kyushu Univ. (Japan)
S. Takao, Kyushu Univ. (Japan)
S. Nakao, Kyushu Univ. (Japan)
K. Harada, Kyushu Univ. (Japan)
M. Higashihata, Kyushu Univ. (Japan)
T. Okada, Kyushu Univ. (Japan)

Published in SPIE Proceedings Vol. 9350:
Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XX
Stephan Roth; Yoshiki Nakata; Beat Neuenschwander; Xianfan Xu, Editor(s)

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