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Proceedings Paper

Quantum tunneling photoacoustic spectroscopy for the characterization of thin films
Author(s): Benjamin S. Goldschmidt; Anna M. Rudy; Swarnasri Mandal; Charissa A. Nowak; John A. Viator; Heather K. Hunt
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Paper Abstract

Thin films continue to show great promise for improving a wide variety of devices in applications such as medical instrumentation, material processing, and astronomical instrumentation. While ellipsometry and reflectometry are standard characterization techniques for determining thickness and refractive index, these techniques tend to require highly reflective or polished films and rely on empirical equations. We have created Quantum Tunneling Photoacoustic Spectroscopy (QTPAS) that uses light induced ultrasound to obtain thickness and refractive index estimates of transparent films. We present QTPAS to be used for the estimation of properties of single layer films as an alternative to ellipsometry and give qualitative sample measurements of the technique's estimated parameters.

Paper Details

Date Published: 13 March 2015
PDF: 11 pages
Proc. SPIE 9369, Photonic Instrumentation Engineering II, 93690A (13 March 2015); doi: 10.1117/12.2080093
Show Author Affiliations
Benjamin S. Goldschmidt, Univ. of Missouri (United States)
Duquesne Univ. (United States)
Anna M. Rudy, Univ. of Missouri (United States)
Swarnasri Mandal, Univ. of Missouri (United States)
Charissa A. Nowak, Univ. of Missouri (United States)
John A. Viator, Duquesne Univ. (United States)
Heather K. Hunt, Univ. of Missouri (United States)

Published in SPIE Proceedings Vol. 9369:
Photonic Instrumentation Engineering II
Yakov G. Soskind; Craig Olson, Editor(s)

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