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Proceedings Paper

Double high refractive-index contrast grating VCSEL
Author(s): Marcin Gębski; Maciej Dems; Michał Wasiak; Robert P. Sarzała; J. A Lott; Tomasz Czyszanowski
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Paper Abstract

Distributed Bragg reflectors (DBRs) are typically used as the highly reflecting mirrors of vertical-cavity surface-emitting lasers (VCSELs). In order to provide optical field confinement, oxide apertures are often incorporated in the process of the selective wet oxidation of high aluminum-content DBR layers. This technology has some potential drawbacks such as difficulty in controlling the uniformity of the oxide aperture diameters across a large-diameter (≥ 6 inch) production wafers, high DBR series resistance especially for small diameters below about 5 μm despite elaborate grading and doping schemes, free carrier absorption at longer emission wavelengths in the p-doped DBRs, reduced reliability for oxide apertures placed close to the quantum wells, and low thermal conductivity for transporting heat away from the active region. A prospective alternative mirror is a high refractive index contrast grating (HCG) monolithically integrated with the VCSEL cavity. Two HCG mirrors potentially offer a very compact and simplified VCSEL design although the problems of resistance, heat dissipation, and reliability are not completely solved. We present an analysis of a double HCG 980 nm GaAs-based ultra-thin VCSEL. We analyze the optical confinement of such a structure with a total optical thickness is ~1.0λ including the optical cavity and the two opposing and parallel HCG mirrors.

Paper Details

Date Published: 4 March 2015
PDF: 7 pages
Proc. SPIE 9381, Vertical-Cavity Surface-Emitting Lasers XIX, 93810Q (4 March 2015); doi: 10.1117/12.2079328
Show Author Affiliations
Marcin Gębski, Lodz Univ. of Technology (Poland)
Maciej Dems, Lodz Univ. of Technology (Poland)
Michał Wasiak, Lodz Univ. of Technology (Poland)
Robert P. Sarzała, Lodz Univ. of Technology (Poland)
J. A Lott, Technische Univ. Berlin (Germany)
Tomasz Czyszanowski, Lodz Univ. of Technology (Poland)


Published in SPIE Proceedings Vol. 9381:
Vertical-Cavity Surface-Emitting Lasers XIX
Chun Lei; Kent D. Choquette, Editor(s)

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