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Proceedings Paper

Technological platform for vertical multi-wafer integration of miniature imaging instruments
Author(s): S. Bargiel; M. Baranski; N. Passilly; C. Gorecki; M. Wiemer; J. Frömel; D. Wünsch; W. -S. Wang
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Paper Abstract

We describe a technological platform developed for miniaturization of optical imaging instruments, such as laser scanning confocal microscopes or Optical Coherence Tomography devices. The platform employs multi-wafer vertical integration approach, combined with integrated glass-based micro-optics and heterogeneous bonding and interconnecting technologies. In this paper we focus on the unconventional fabrication methods of monolithic micro-optical structures and components in borosilicate glass (e.g. micro beamsplitters, refractive microlenses) for optical beam shaping and routing. In addition, we present hybrid laser-assisted integration of glass ball microlenses on the silicon MEMS actuators for transmissive beam scanning as well as methods of electrical signals distribution through thick glass substrates, based on HF etched via holes.

Paper Details

Date Published: 27 February 2015
PDF: 8 pages
Proc. SPIE 9375, MOEMS and Miniaturized Systems XIV, 93750L (27 February 2015); doi: 10.1117/12.2078007
Show Author Affiliations
S. Bargiel, Institute FEMTO-ST, Univ. de Franche-Comté (France)
M. Baranski, Institute FEMTO-ST, Univ. de Franche-Comté (France)
N. Passilly, Institute FEMTO-ST, Univ. de Franche-Comté (France)
C. Gorecki, Institute FEMTO-ST, Univ. de Franche-Comté (France)
M. Wiemer, Fraunhofer-Institut für Elektronische Nanosysteme (Germany)
J. Frömel, Fraunhofer-Institut für Elektronische Nanosysteme (Germany)
D. Wünsch, Fraunhofer-Institut für Elektronische Nanosysteme (Germany)
W. -S. Wang, Fraunhofer-Institut für Elektronische Nanosysteme (Germany)

Published in SPIE Proceedings Vol. 9375:
MOEMS and Miniaturized Systems XIV
Wibool Piyawattanametha; Yong-Hwa Park, Editor(s)

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