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Proceedings Paper

Reversible deformation in hybrid organic-inorganic photoresists processed by ultrafast direct laser write technique
Author(s): Vygantas Mizeikis; Sima Rekštytė; Vytautas Purlys; Saulius Juodkazis
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Paper Abstract

We report on reversible deformation in photoresist structures patterned using femtosecond direct laser write technique. Significant swelling and shrinkage of exposed features by up to 10% in negative-tone hybrid organicinorganic Zr containing photoresist SZ2080 were found to occur during wet development and rinse following the laser processing. Amount of swelling and shrinkage is controllable within 10% margin via use of different rinse agents and the shrinkage-swelling cycle can be repeated many times. Simple interpretation of this phenomenon is presented, and several potential application areas in diffractive optics, micro mechanics, actuation, and environmental sensing are outlined.

Paper Details

Date Published: 13 March 2015
PDF: 7 pages
Proc. SPIE 9374, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics VIII, 937408 (13 March 2015); doi: 10.1117/12.2077553
Show Author Affiliations
Vygantas Mizeikis, Shizuoka Univ. (Japan)
Sima Rekštytė, Vilnius Univ. (Lithuania)
Vytautas Purlys, Vilnius Univ. (Lithuania)
Saulius Juodkazis, Swinburne Univ. of Technology (Australia)

Published in SPIE Proceedings Vol. 9374:
Advanced Fabrication Technologies for Micro/Nano Optics and Photonics VIII
Georg von Freymann; Winston V. Schoenfeld; Raymond C. Rumpf; Henry Helvajian, Editor(s)

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