For high-resolution printing, we have developed a novel way of functional microdots deposition based on laser-induced forward transfer, which is referred to laser-induced dot transfer (LIDT). LIDT is one of promising additive manufacturing techniques because it can realize flexible patterning of micron and submicron-sized dots at atmospheric room-temperature conditions. Recently we have achieved printing of functional oxide microdots by a double-pulse LIDT with the first pulse for preheat and the second pulse for transfer, resulting in more precise control of laser-induced hightemperature and thermal-stress in a source film. In this paper, temporal temperature distributions during the transfer process have been investigated using a finite element method approach. High-resolution printing of functional microdots is promising for future optoelectronic integrations.

Date Published: 4 March 2015
PDF: 8 pages
Proc. SPIE 9350, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XX, 93500I (4 March 2015); doi: 10.1117/12.2077527

Published in SPIE Proceedings Vol. 9350:
Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XX
Stephan Roth; Yoshiki Nakata; Beat Neuenschwander; Xianfan Xu, Editor(s)