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Proceedings Paper

Slot waveguide ring resonators for visible wavelengths in ALD titanium dioxide
Author(s): Markus Häyrinen; Matthieu Roussey; Antti Säynätjoki; Markku Kuittinen; Seppo Honkanen
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Paper Abstract

Titanium dioxide (TiO2) ring resonators based on slot-waveguides were designed, fabricated and characterized for operating wavelengths in the visible and near infrared regions. The fabrication methods include atomic layer deposition (ALD), electron beam lithography (EBL) and reactive ion etching (RIE). The required narrow slot width (30 nm) was achieved by using a conformal ALD re-coating method, i.e., a feature size reduction technique, after the final etching step. The quality factors of the device were estimated to be 626 at 664 nm wavelength and 3446 at 1516 nm wavelength. The results show that the ALD-TiO2 is a promising platform for sensing applications for visible wavelengths.

Paper Details

Date Published: 27 February 2015
PDF: 6 pages
Proc. SPIE 9365, Integrated Optics: Devices, Materials, and Technologies XIX, 936513 (27 February 2015); doi: 10.1117/12.2077413
Show Author Affiliations
Markus Häyrinen, Univ. of Eastern Finland (Finland)
Matthieu Roussey, Univ. of Eastern Finland (Finland)
Antti Säynätjoki, Aalto Univ. (Finland)
Markku Kuittinen, Univ. of Eastern Finland (Finland)
Seppo Honkanen, Univ. of Eastern Finland (Finland)

Published in SPIE Proceedings Vol. 9365:
Integrated Optics: Devices, Materials, and Technologies XIX
Jean-Emmanuel Broquin; Gualtiero Nunzi Conti, Editor(s)

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