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Proceedings Paper

High-quality slot waveguide ring resonator based on atomic layer deposition
Author(s): A. Autere; L. Karvonen; A. Säynätjoki; M. Roussey; E. Färm; M. Kemell; X. Tu; T. Y. Liow; G. Q. Lo; M. Ritala; M. Leskelä; S. Honkanen; Z. Sun
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Paper Abstract

Slot waveguide based ring resonators filled with atomic layer deposited (ALD) aluminum oxide (Al2O3) were fabricated and characterized. Our results demonstrate that ALD can be used to create slot waveguide ring resonators with relatively high Q-factors, which opens new possibilities for various photonic applications, such as optical sensing and all-optical signal processing.

Paper Details

Date Published: 27 February 2015
PDF: 7 pages
Proc. SPIE 9367, Silicon Photonics X, 93671J (27 February 2015); doi: 10.1117/12.2076903
Show Author Affiliations
A. Autere, Aalto Univ. (Finland)
L. Karvonen, Aalto Univ. (Finland)
A. Säynätjoki, Aalto Univ. (Finland)
M. Roussey, Univ. of Eastern Finland (Finland)
E. Färm, Univ. of Helsinki (Finland)
M. Kemell, Univ. of Helsinki (Finland)
X. Tu, A*STAR Institute of Microelectronics (Singapore)
T. Y. Liow, A*STAR Institute of Microelectronics (Singapore)
G. Q. Lo, A*STAR Institute of Microelectronics (Singapore)
M. Ritala, Univ. of Helsinki (Finland)
M. Leskelä, Univ. of Helsinki (Finland)
S. Honkanen, Univ. of Eastern Finland (Finland)
Z. Sun, Aalto Univ. (Finland)

Published in SPIE Proceedings Vol. 9367:
Silicon Photonics X
Graham T. Reed; Michael R. Watts, Editor(s)

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