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Proceedings Paper

Large size MOEMS Fabry-Perot interferometer filter for focal plane array hyperspectral imaging
Author(s): J. Chee; J. Hwu; T. S. Kim; J. Kubby; S. Velicu; N. Gupta
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Paper Abstract

Focal plane array (FPA) technology is mature and is widely used for imaging applications. However, FPAs have broadband responses which limit their ability to provide high performance in hyperspectral applications such as detection of buried explosives, and identifying the presence of explosive chemicals and their concentrations. EPIR is currently developing Micro-Opto-Electro-Mechanical System (MOEMS) Fabry-Perot interferometer filter (FPF) devices for FPAs. In this paper, we present our approach to MOEMS FPF design and fabrication that will meet the size requirements for large format FPA hyperspectral imaging. We also report the performance of our FPF resonance cavity, capable of up to 3 μm change gap in tens of nanometer increments.

Paper Details

Date Published: 27 February 2015
PDF: 7 pages
Proc. SPIE 9375, MOEMS and Miniaturized Systems XIV, 93750K (27 February 2015); doi: 10.1117/12.2076615
Show Author Affiliations
J. Chee, EPIR Technologies, Inc. (United States)
J. Hwu, Univ. of California, Santa Cruz (United States)
T. S. Kim, Univ. of California, Santa Cruz (United States)
J. Kubby, Univ. of California, Santa Cruz (United States)
S. Velicu, EPIR Technologies, Inc. (United States)
N. Gupta, U.S. Army Research Lab. (United States)

Published in SPIE Proceedings Vol. 9375:
MOEMS and Miniaturized Systems XIV
Wibool Piyawattanametha; Yong-Hwa Park, Editor(s)

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