We measured the dielectric constant of optically excited silicon and tungsten using a dual-angle femtosecond reflectivity pump-probe technique. The energy deposition in the formation of laser-induced periodic surface structures (LIPSS) is then investigated by simulating the laser pulse interaction with an initially random distributed rough surface using 3D-Finite Difference Time Domain (FDTD) method, with the measured dielectric constant as a material input. We found in the FDTD simulation periodic energy deposition patterns both perpendicular and parallel to the laser polarization. The origin of them are discussed for originally plasmonic and non-plasmonic material.

Date Published: 12 March 2015
PDF: 9 pages
Proc. SPIE 9351, Laser-based Micro- and Nanoprocessing IX, 93510H (12 March 2015); doi: 10.1117/12.2076593

Published in SPIE Proceedings Vol. 9351:
Laser-based Micro- and Nanoprocessing IX
Udo Klotzbach; Kunihiko Washio; Craig B. Arnold, Editor(s)