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Proceedings Paper

Fabrication of 3D solenoid microcoils in silica glass by femtosecond laser wet etch and microsolidics
Author(s): Xiangwei Meng; Qing Yang; Feng Chen; Chao Shan; Keyin Liu; Yanyang Li; Hao Bian; Guangqing Du; Xun Hou
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Paper Abstract

This paper reports a flexible fabrication method for 3D solenoid microcoils in silica glass. The method consists of femtosecond laser wet etching (FLWE) and microsolidics process. The 3D microchannel with high aspect ratio is fabricated by an improved FLWE method. In the microsolidics process, an alloy was chosen as the conductive metal. The microwires are achieved by injecting liquid alloy into the microchannel, and allowing the alloy to cool and solidify. The alloy microwires with high melting point can overcome the limitation of working temperature and improve the electrical property. The geometry, the height and diameter of microcoils were flexibly fabricated by the pre-designed laser writing path, the laser power and etching time. The 3D microcoils can provide uniform magnetic field and be widely integrated in many magnetic microsystems.

Paper Details

Date Published: 19 February 2015
PDF: 7 pages
Proc. SPIE 9449, The International Conference on Photonics and Optical Engineering (icPOE 2014), 94493N (19 February 2015); doi: 10.1117/12.2075880
Show Author Affiliations
Xiangwei Meng, Xi'an Jiaotong Univ. (China)
Qing Yang, Xi'an Jiaotong Univ. (China)
Feng Chen, Xi'an Jiaotong Univ. (China)
Chao Shan, Xi'an Jiaotong Univ. (China)
Keyin Liu, Xi'an Jiaotong Univ. (China)
Yanyang Li, Xi'an Jiaotong Univ. (China)
Hao Bian, Xi'an Jiaotong Univ. (China)
Guangqing Du, Xi'an Jiaotong Univ. (China)
Xun Hou, Xi'an Jiaotong Univ. (China)

Published in SPIE Proceedings Vol. 9449:
The International Conference on Photonics and Optical Engineering (icPOE 2014)
Ailing Tian; Anand Asundi; Weiguo Liu; Chunmin Zhang, Editor(s)

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