We have built a novel oblique angle scatterometer designed and optimized for measurements of rough surfaces having a root mean square roughness value (RMS Roughness) on the order of 100 nm – 1000 nm or larger. The majority of existing techniques for measurement of such surfaces are slow, sensitive to vibration, provide short or no working distance, may result in generation of particles and have very small throughput.¹ In this paper, we novel metrology addressing the above limitations.

Date Published: 9 March 2015
PDF: 7 pages
Proc. SPIE 9383, Light-Emitting Diodes: Materials, Devices, and Applications for Solid State Lighting XIX, 93830W (9 March 2015); doi: 10.1117/12.2075540

Published in SPIE Proceedings Vol. 9383:
Light-Emitting Diodes: Materials, Devices, and Applications for Solid State Lighting XIX
Klaus P. Streubel; Heonsu Jeon; Li-Wei Tu; Martin Strassburg, Editor(s)