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Proceedings Paper

HOE for clock distribution in integrated circuits: experimental results
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Paper Abstract

This paper reports the design and fabrication of transmission holographic optical elements (HOEs) for clock distribution. First, we have studied and fabricated a multi-focus doublet HOE. The aberrations due to the wavelength shift between recording ( = 488 nm) and reconstruction ( = 780 nm) have been minimized by an appropriate recording and readout geometry. The diffraction efficiency has been optimized by a copying technique. Second, we have investigated the near-field internal reflection (TIR) holographic recording technique to solve the problems of miniaturization. With this method, we have recorded a lOOxlOO lenlet array with focal lengths of f =400 μm.

Paper Details

Date Published: 1 August 1990
PDF: 10 pages
Proc. SPIE 1281, Optical Interconnections and Networks, (1 August 1990); doi: 10.1117/12.20685
Show Author Affiliations
D. Prongue, Univ. of Neuchatel (Switzerland)
Hans Peter Herzig, Univ. of Neuchatel (Switzerland)

Published in SPIE Proceedings Vol. 1281:
Optical Interconnections and Networks
Hartmut Bartelt, Editor(s)

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