In this article we describe a novel piezoresistive cantilever technology The described cantilever can be also applied in the investigations of the thermal surface properties in all Scanning Thermal Microscopy (SThM) techniques. Batch lithography/etch patterning process combined with focused ion beam (FIB) modification allows to manufacture thermally active, resistive tips with a nanometer radius of curvature. This design makes the proposed nanoprobes especially attractive for their application in the measurement of the thermal behavior of micro- and nanoelectronic devices. Developed microcantilever is equipped with piezoresistive deflection sensor. The proposed architecture of the cantilever probe enables easy its easy integration with micro- and nanomanipulators and scanning electron microscopes.In order to approach very precisely the microcantilever near to the location to be characterized, it is mounted on a compact nanomanipulator based on a novel mobile technology. This technology allows very stable positioning, with a nanometric resolution over several centimeters which is for example useful for large samples investigations. Moreover, thanks to the vacuum-compatibility, the experiments can be carried out inside scanning electron microscopes.

Date Published: 16 September 2014
PDF: 11 pages
Proc. SPIE 9236, Scanning Microscopies 2014, 92360R (16 September 2014); doi: 10.1117/12.2066240

Published in SPIE Proceedings Vol. 9236:
Scanning Microscopies 2014
Michael T. Postek; Dale E. Newbury; S. Frank Platek; Tim K. Maugel, Editor(s)