Share Email Print

Proceedings Paper

Linear thin-film position-sensitive detector (LTFPSD) for 3D measurements
Author(s): Rodrigo Martins; Guilherme Lavareda; Elvira Fortunato; Fernando Soares; Luis Fernandes; Luis Alberto Almeida Ferreira
Format Member Price Non-Member Price
PDF $17.00 $21.00

Paper Abstract

A linear array thin film position sensitive detector (LTFPSD) based on hydrogenated amorphous silicon (a-Si:H) is proposed for the first time, taking advantage of the optical properties presented by a-Si:H devices we have developed a LTFPSD with 128 integrated elements able to be used in 3-D inspections/measurements. Each element consists on a one- dimensional LTFPSD, based on a p.i.n. diode produced in a conventional PECVD system, where the doped layers are coated with thin resistive layers to establish the required device equipotentials. By proper incorporation of the LTFPSD into an optical inspection camera it is possible to acquire information about an object/surface, through the optical cross-section method. The main advantages of this system, when compared with the conventional CCDs, are the low complexity of hardware and software used and that the information can be continuously processed (analogue detection).

Paper Details

Date Published: 10 April 1995
PDF: 11 pages
Proc. SPIE 2415, Charge-Coupled Devices and Solid State Optical Sensors V, (10 April 1995);
Show Author Affiliations
Rodrigo Martins, Univ. Nova de Lisboa (Portugal)
Guilherme Lavareda, Univ. Nova de Lisboa (Portugal)
Elvira Fortunato, Univ. Nova de Lisboa (Portugal)
Fernando Soares, CEMOP-UNINOVA (Portugal)
Luis Fernandes, CEMOP-UNINOVA (Portugal)
Luis Alberto Almeida Ferreira, EID (Portugal)

Published in SPIE Proceedings Vol. 2415:
Charge-Coupled Devices and Solid State Optical Sensors V
Morley M. Blouke, Editor(s)

© SPIE. Terms of Use
Back to Top
Sign in to read the full article
Create a free SPIE account to get access to
premium articles and original research
Forgot your username?