Atmospheric scanning electron microscopy (ASEM) for observing samples at ambient atmospheric pressure is introduced in this study. An additional specimen chamber with a thin membrane allowing electron beam propagation is inserted in the main specimen chamber. Close proximity of the sample to the membrane enables the detection of backscattered electrons (BSEs) sufficient for imaging. A probability analysis of the un-scattered fraction of the incident electron beam and the beam profile further supports the feasibility of atmospheric SEM imaging over a controlled membrane-sample distance. An image enhancement method based on the analysis is introduced for the ASEM.

Date Published: 16 September 2014
PDF: 7 pages
Proc. SPIE 9236, Scanning Microscopies 2014, 923604 (16 September 2014); doi: 10.1117/12.2064935

Published in SPIE Proceedings Vol. 9236:
Scanning Microscopies 2014
Michael T. Postek; Dale E. Newbury; S. Frank Platek; Tim K. Maugel, Editor(s)