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Proceedings Paper

A novel approach for scanning electron microscopic observation in atmospheric pressure
Author(s): Yusuke Ominami; Kenji Nakahira; Shinsuke Kawanishi; Tatsuo Ushiki; Sukehiro Ito
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Paper Abstract

Atmospheric scanning electron microscopy (ASEM) for observing samples at ambient atmospheric pressure is introduced in this study. An additional specimen chamber with a thin membrane allowing electron beam propagation is inserted in the main specimen chamber. Close proximity of the sample to the membrane enables the detection of backscattered electrons (BSEs) sufficient for imaging. A probability analysis of the un-scattered fraction of the incident electron beam and the beam profile further supports the feasibility of atmospheric SEM imaging over a controlled membrane-sample distance. An image enhancement method based on the analysis is introduced for the ASEM.

Paper Details

Date Published: 16 September 2014
PDF: 7 pages
Proc. SPIE 9236, Scanning Microscopies 2014, 923604 (16 September 2014); doi: 10.1117/12.2064935
Show Author Affiliations
Yusuke Ominami, Hitachi High-Tech Science Corp. (Japan)
Kenji Nakahira, Hitachi Ltd. Yokohama Research Lab. (Japan)
Shinsuke Kawanishi, Hitachi High-Tech Science Corp. (Japan)
Tatsuo Ushiki, Niigata Univ. (Japan)
Sukehiro Ito, Hitachi High-Tech Science Corp. (Japan)

Published in SPIE Proceedings Vol. 9236:
Scanning Microscopies 2014
Michael T. Postek; Dale E. Newbury; S. Frank Platek; Tim K. Maugel, Editor(s)

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