Proceedings Paper
Complete shape measurement of micro parts by digital holography| Format | Member Price | Non-Member Price |
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Paper Abstract
Industry frequently demands fast and robust measurement techniques for the inline inspection of the full shape
of objects in the micro range. We present a method for complete 360 degree measurement of the shape of
a micro cup using digital holographic microscopy and show first results of sequential 360 degree measurement
using different illumination and observation directions.
Paper Details
Date Published: 18 August 2014
PDF: 8 pages
Proc. SPIE 9203, Interferometry XVII: Techniques and Analysis, 920302 (18 August 2014); doi: 10.1117/12.2063389
Published in SPIE Proceedings Vol. 9203:
Interferometry XVII: Techniques and Analysis
Katherine Creath; Jan Burke; Joanna Schmit, Editor(s)
PDF: 8 pages
Proc. SPIE 9203, Interferometry XVII: Techniques and Analysis, 920302 (18 August 2014); doi: 10.1117/12.2063389
Show Author Affiliations
S. Huferath-von Luepke, Bremer Institut für angewandte Strahltechnik GmbH (Germany)
R. Klattenhoff, Bremer Institut für angewandte Strahltechnik GmbH (Germany)
C. Dankwart, Bremer Institut für angewandte Strahltechnik GmbH (Germany)
R. Klattenhoff, Bremer Institut für angewandte Strahltechnik GmbH (Germany)
C. Dankwart, Bremer Institut für angewandte Strahltechnik GmbH (Germany)
C. Falldorf, Bremer Institut für angewandte Strahltechnik GmbH (Germany)
R. B. Bergmann, Bremer Institut für angewandte Strahltechnik GmbH (Germany)
Univ. Bremen (Germany)
R. B. Bergmann, Bremer Institut für angewandte Strahltechnik GmbH (Germany)
Univ. Bremen (Germany)
Published in SPIE Proceedings Vol. 9203:
Interferometry XVII: Techniques and Analysis
Katherine Creath; Jan Burke; Joanna Schmit, Editor(s)
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