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Proceedings Paper

Interferometric microscope with true color imaging
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Paper Abstract

Optical 3D profilers based on Coherence Scanning Interferometry (CSI) provide high-resolution non-contact metrology for a broad range of applications. Capture of true color information together with 3D topography enables the detection of defects, blemishes or discolorations that are not as easily identified in topography data alone. Uses for true color 3D imaging include image segmentation, detection of dissimilar materials and edge enhancement. This paper discusses the pros and cons of color capture using standard color detectors and presents an alternative solution that does not rely on color filters at the camera, thus preserving the high lateral and vertical resolution of CSI instruments.

Paper Details

Date Published: 18 August 2014
PDF: 10 pages
Proc. SPIE 9203, Interferometry XVII: Techniques and Analysis, 92030S (18 August 2014); doi: 10.1117/12.2063264
Show Author Affiliations
J. L. Beverage, Zygo Corporation (United States)
X. Colonna de Lega, Zygo Corporation (United States)
M. F. Fay, Zygo Corporation (United States)


Published in SPIE Proceedings Vol. 9203:
Interferometry XVII: Techniques and Analysis
Katherine Creath; Jan Burke; Joanna Schmit, Editor(s)

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