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Proceedings Paper

Recent advances in scanning Microwave Impedance Microscopy (sMIM) for nano-scale measurements and industrial applications
Author(s): Stuart Friedman; Oskar Amster; Yongliang Yang
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Paper Abstract

Scanning Microwave Impedance Microscopy (sMIM), a new electrical measurement mode for AFM, has shown significant success in the imaging and characterization of electrical properties at 10's of nm length scales. We review the state of the art, including imaging studies revealing electrical characteristics of novel materials and nanostructures, such as composites, graphene, patterned optical crystals and ferro-electrics. The technique is suited for a variety of metrology applications where specific physical properties are determined quantitatively. Examples include the measurement of dielectric constant (permittivity) and conductivity. These capabilities will be presented, illustrating sensitivity and resolution for dielectric constant, doping levels and capacitance.

Paper Details

Date Published: 27 August 2014
PDF: 8 pages
Proc. SPIE 9173, Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors VIII, 917308 (27 August 2014); doi: 10.1117/12.2063138
Show Author Affiliations
Stuart Friedman, PrimeNano, Inc. (United States)
Oskar Amster, PrimeNano, Inc. (United States)
Yongliang Yang, PrimeNano, Inc. (United States)

Published in SPIE Proceedings Vol. 9173:
Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors VIII
Michael T. Postek, Editor(s)

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