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Proceedings Paper

Optical interconnection on silicon LSI chips
Author(s): Shin Yokoyama; T. Nagata; T. Namba; Y. Kuroda; Toshiki Doi; Koji Miyake; S. Miyazaki; Atsushi Iwata; Tadashi Ae; Mitsumasa Koyanagi; Masataka Hirose
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Paper Abstract

Light propagation loss of the micron size optical waveguides is found to be improved from 1.8 to 0.6 dB/cm by capping waveguides by Al film. Al micromirrors for changing the light propagation direction in the vertical and horizontal planes were fabricated. Various shapes of Al corner mirrors to change the light direction in the horizontal plane were investigated. The straight simple mirror at an angle of 45 degree(s) against the incident light has the largest reflectivity of 50%. Branched waveguides were also fabricated by using Al corner mirrors and resulted in the almost equal distribution of the light for three branches. Light emitting diodes (LEDs), micromirrors, waveguides and photodetectors have been integrated on a single chip and the signal transfer from the LED to the photodetector has been verified.

Paper Details

Date Published: 5 April 1995
PDF: 5 pages
Proc. SPIE 2400, Optoelectronic Interconnects III, (5 April 1995); doi: 10.1117/12.206297
Show Author Affiliations
Shin Yokoyama, Hiroshima Univ. (Japan)
T. Nagata, Hiroshima Univ. (Japan)
T. Namba, Hiroshima Univ. (Japan)
Y. Kuroda, Hiroshima Univ. (Japan)
Toshiki Doi, Hiroshima Univ. (Japan)
Koji Miyake, Hiroshima Univ. (Japan)
S. Miyazaki, Hiroshima Univ. (Japan)
Atsushi Iwata, Hiroshima Univ. (Japan)
Tadashi Ae, Hiroshima Univ. (Japan)
Mitsumasa Koyanagi, Tohoku Univ. (Japan)
Masataka Hirose, Hiroshima Univ. (Japan)

Published in SPIE Proceedings Vol. 2400:
Optoelectronic Interconnects III
Ray T. Chen; Harvard Scott Hinton, Editor(s)

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