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Proceedings Paper

Toward achromatic soft x-ray imaging system with sub-10-nm spatial resolution
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Paper Abstract

The Wolter mirror has been a promising imaging device in X-ray microscopy owing to its excellent characteristics such as no achromatic aberration, a large aperture and a long work distance. Despite its long history, a Wolter mirror has not been practically used for high resolution microscopy because extremely high figure accuracy is required on the surface. In this paper, we will show the result of optical simulations targeted at the design of a soft X-ray imaging system with sub-10nm spatial resolution.

Paper Details

Date Published: 5 September 2014
PDF: 9 pages
Proc. SPIE 9207, Advances in X-Ray/EUV Optics and Components IX, 92070R (5 September 2014); doi: 10.1117/12.2062702
Show Author Affiliations
Satoru Egawa, The Univ. of Tokyo (Japan)
Hidekazu Mimura, The Univ. of Tokyo (Japan)

Published in SPIE Proceedings Vol. 9207:
Advances in X-Ray/EUV Optics and Components IX
Christian Morawe; Ali M. Khounsary; Shunji Goto, Editor(s)

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