High-energy x-rays from a synchrotron source are well suited for numerous applications, such as studies of materials structure and stress in bulk or extreme environments. Some of these methods require high spatial resolution. Planar kinoforms are shown to focus monochromatized undulator radiation in the 50–100 keV range down to 0.2–1.5 μm beam sizes at 0.25–2 m focal distances. These lenses were fabricated by reactive ion etching of silicon. At such high x-ray energies, these optics can offer substantial transmission and lens aperture.

Date Published: 17 September 2014
PDF: 9 pages
Proc. SPIE 9207, Advances in X-Ray/EUV Optics and Components IX, 920704 (17 September 2014); doi: 10.1117/12.2062635

Published in SPIE Proceedings Vol. 9207:
Advances in X-Ray/EUV Optics and Components IX
Christian Morawe; Ali M. Khounsary; Shunji Goto, Editor(s)