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Proceedings Paper

Damage of EUV optical coatings induced by alpha-particles bombardment
Author(s): M. G. Pelizzo; S. Zuccon; E. Napolitani; A. J. Corso; P. Zuppella; E. Tessarolo; M. Nardello; F. Gerlin; G. Naletto; S. Fineschi; E. Antonucci
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Paper Abstract

Future solar missions will investigate the Sun from very close distances and optical components are constantly exposed to low energy ions irradiation. Single layer thin films as well as extreme ultraviolet multilayer coatings have been exposed to low energy alpha particles (4keV). In order to change the total dose accumulated, for each ion fluency the time of exposure was varied. The experiment was carried out considering typical doses accumulated during the ESA Solar Orbiter mission. Results show that ion implantation affects the performances of both single and multilayer coatings.

Paper Details

Date Published: 5 September 2014
PDF: 8 pages
Proc. SPIE 9207, Advances in X-Ray/EUV Optics and Components IX, 920715 (5 September 2014); doi: 10.1117/12.2062553
Show Author Affiliations
M. G. Pelizzo, IFN-CNR LUXOR Lab. (Italy)
Univ. degli Studi di Padova (Italy)
S. Zuccon, IFN-CNR LUXOR Lab. (Italy)
E. Napolitani, Univ. degli Studi di Padova (Italy)
A. J. Corso, IFN-CNR LUXOR Lab. (Italy)
P. Zuppella, IFN-CNR LUXOR Lab. (Italy)
E. Tessarolo, IFN-CNR LUXOR Lab. (Italy)
M. Nardello, IFN-CNR LUXOR Lab. (Italy)
Univ. degli Studi di Padova (Italy)
F. Gerlin, IFN-CNR LUXOR Lab. (Italy)
G. Naletto, IFN-CNR LUXOR Lab. (Italy)
Univ. degli Studi di Padova (Italy)
S. Fineschi, INAF - Osservatorio Astronomico di Torino (Italy)
E. Antonucci, INAF - Osservatorio Astronomico di Torino (Italy)


Published in SPIE Proceedings Vol. 9207:
Advances in X-Ray/EUV Optics and Components IX
Christian Morawe; Ali M. Khounsary; Shunji Goto, Editor(s)

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