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Proceedings Paper

Surface excitation mediated physics in low-fluence laser material interactions and applications to thin-film material processing
Author(s): Henry Helvajian
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Paper Abstract

A case is presented for processing of advanced materials via low fluence lasers where the incident fluence is below the ablation threshold. A processing technique is presented which may have application to nanometer scale 'machining'. The technique relies on partially offsetting the reduced incident fluence with enhancement in the efficiency of coupling energy to surface electromagnetic waves (Plasmons). Experimental results are shown that surface corrugation enhances coupling of incident laser radiation to surface plasmons. Additional results are presented in which plasmon excitation results in the nonthermal ejection of ionic species. An experimental result is presented on a composite thin-film material where a specific material plasmon excitation results in a commensurate signature in the species ejection kinetic energy.

Paper Details

Date Published: 10 April 1995
PDF: 13 pages
Proc. SPIE 2403, Laser-Induced Thin Film Processing, (10 April 1995); doi: 10.1117/12.206247
Show Author Affiliations
Henry Helvajian, The Aerospace Corp. (United States)

Published in SPIE Proceedings Vol. 2403:
Laser-Induced Thin Film Processing
Jan J. Dubowski, Editor(s)

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