Autocollimator-based long trace profiler requires precise angular calibration to perform accurate measurements for xray mirrors. A prototype of a precision two-dimensional tip-tilting stage system has been designed and tested for a new autocollimator-based long trace profiler at the Advanced Photon Source (APS), Argonne National Laboratory (ANL). This flexural stage system is designed to meet challenging mechanical and optical specifications for producing high positioning resolution and stability for angular calibration for autocollimator-based long trace profiler. It could also be used as a precision mirror manipulator for hard x-ray nano-focusing with Montel mirror optics. The mechanical design of a precision two-dimensional tip-tilting stage system as well as preliminary test results of its precision positioning performance are presented in this paper.

Date Published: 5 September 2014
PDF: 8 pages
Proc. SPIE 9206, Advances in Metrology for X-Ray and EUV Optics V, 92060H (5 September 2014); doi: 10.1117/12.2062216

Published in SPIE Proceedings Vol. 9206:
Advances in Metrology for X-Ray and EUV Optics V
Lahsen Assoufid; Haruhiko Ohashi; Anand Krishna Asundi, Editor(s)