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Proceedings Paper

Developing detection efficiency standards for atom probe tomography
Author(s): Ty J. Prosa; Brian P. Geiser; Dan Lawrence; David Olson; David J. Larson
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Paper Abstract

Atom Probe Tomography (APT) is a near-atomic-scale analytical technique which, due to recent advances in instrumentation and sample preparation techniques, is being used on a variety of 3D applications. Total system detection efficiency is a key parameter for obtaining accurate spatial reconstruction of atomic coordinates from detected ions, but experimental determination of efficiency can be difficult. This work explores new ways to measure total system detection efficiency as well as the specimen characteristics necessary for such measurements. Composite specimens composed of a nickel/chromium multilayer core, National Institute of Standards and Technology Standard Reference Material 2135c, encapsulated with silver, silicon, or nickel were used to demonstrate the suitability of this approach for providing a direct measurement of APT efficiency. Efficiency measurements based on this multilayer encapsulated in nickel are reported.

Paper Details

Date Published: 27 August 2014
PDF: 8 pages
Proc. SPIE 9173, Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors VIII, 917307 (27 August 2014); doi: 10.1117/12.2062211
Show Author Affiliations
Ty J. Prosa, CAMECA Instruments, Inc. (United States)
Brian P. Geiser, CAMECA Instruments, Inc. (United States)
Dan Lawrence, CAMECA Instruments, Inc. (United States)
David Olson, CAMECA Instruments, Inc. (United States)
David J. Larson, CAMECA Instruments, Inc. (United States)

Published in SPIE Proceedings Vol. 9173:
Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors VIII
Michael T. Postek, Editor(s)

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