
Proceedings Paper
Specific aspects of roughness and interface diffusion in non-periodic Mo/Si multilayersFormat | Member Price | Non-Member Price |
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Paper Abstract
Most of the currently used reflective coatings for EUV and X-ray mirrors are periodic nanometer multilayers. Depending
on the number of periods and the absorption in the multilayer stack a certain band width of the incoming radiation can be
reflected. In order to increase the integral reflectance or to accept larger ranges of incidence angles, non-periodic
multilayers are needed. With the transition from periodic to non-periodic multilayers new challenges arise for the
deposition process. Since the reflectance spectra are sensitive to every single layer thickness a precise coating control
and an exact knowledge of the interface reactions are required. Furthermore substrate roughness influences the
reflectance spectra. With an advanced coating process using additional ion bombardment during thin film growth the
integrated reflectance of broadband mirrors can be conserved even for an initial substrate roughness of about 0.7 nm rms.
Paper Details
Date Published: 17 September 2014
PDF: 10 pages
Proc. SPIE 9207, Advances in X-Ray/EUV Optics and Components IX, 920707 (17 September 2014); doi: 10.1117/12.2062193
Published in SPIE Proceedings Vol. 9207:
Advances in X-Ray/EUV Optics and Components IX
Christian Morawe; Ali M. Khounsary; Shunji Goto, Editor(s)
PDF: 10 pages
Proc. SPIE 9207, Advances in X-Ray/EUV Optics and Components IX, 920707 (17 September 2014); doi: 10.1117/12.2062193
Show Author Affiliations
Stefan Braun, Fraunhofer IWS Dresden (Germany)
Peter Gawlitza, Fraunhofer IWS Dresden (Germany)
Maik Menzel, Fraunhofer IWS Dresden (Germany)
Peter Gawlitza, Fraunhofer IWS Dresden (Germany)
Maik Menzel, Fraunhofer IWS Dresden (Germany)
Wolfgang Friedrich, Fraunhofer IWS Dresden (Germany)
Jürgen Schmidt, Fraunhofer IWS Dresden (Germany)
Andreas Leson, Fraunhofer IWS Dresden (Germany)
Jürgen Schmidt, Fraunhofer IWS Dresden (Germany)
Andreas Leson, Fraunhofer IWS Dresden (Germany)
Published in SPIE Proceedings Vol. 9207:
Advances in X-Ray/EUV Optics and Components IX
Christian Morawe; Ali M. Khounsary; Shunji Goto, Editor(s)
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