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Proceedings Paper

Comparison of full-field interferometric measurement techniques applied to small vibration amplitudes determination
Author(s): Adam Styk
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Paper Abstract

Classical time-averaging and stroboscopic interferometry are widely used for MEMS/MOEMS dynamic behavior investigations. Unfortunately both methods require an amplitude magnitude of at least 0.19λ to be able to detect resonant frequency of the object. Moreover the precision of measurement is limited. That puts strong constrains on the type of element to be tested. In this paper the comparison of two methods of microobject vibration measurements that overcome aforementioned problems are presented. Both methods maintain high speed measurement time and extend the range of amplitudes to be measured (below 0.19λ), moreover can be easily applied to MEMS/MOEMS dynamic parameters measurements.

Paper Details

Date Published: 18 August 2014
PDF: 12 pages
Proc. SPIE 9203, Interferometry XVII: Techniques and Analysis, 92030V (18 August 2014); doi: 10.1117/12.2062137
Show Author Affiliations
Adam Styk, Warsaw Univ. of Technology (Poland)

Published in SPIE Proceedings Vol. 9203:
Interferometry XVII: Techniques and Analysis
Katherine Creath; Jan Burke; Joanna Schmit, Editor(s)

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