The autocollimator and moveable pentaprism based DLTP [NIM A 616 (2010) 212-223], a low-budget, NOM-like profiler at the Advanced Light Source (ALS), has been upgraded to provide fast, highly accurate surface slope metrology for long, side-facing, x-ray optics. This instrument arrangement decreases sensitivity to environmental conditions and removes the gravity effect on mirror shape. We provide design details of an affordable base tool, including clean-room environmental arrangements in the new ALS X-ray Optics Laboratory with advanced temperature stabilization and turbulence reduction, that yield measurements in under 8 hours with accuracy better than 30 nanoradians (rms) for super polished,190 mm flat optics, limited mainly by residual temporal instability of the experimental set-up. The upgraded DLTP has been calibrated for highly curved x-ray optics, allowing same day measurements of a 15 m ROC sphere with accuracy of better than 100 nanoradians (rms). The developed calibration procedure is discussed in detail. We propose this specific 15 m ROC sphere for use as a round-robin calibration test optic.

Date Published: 17 September 2014
PDF: 11 pages
Proc. SPIE 9206, Advances in Metrology for X-Ray and EUV Optics V, 920603 (17 September 2014); doi: 10.1117/12.2061969

Published in SPIE Proceedings Vol. 9206:
Advances in Metrology for X-Ray and EUV Optics V
Lahsen Assoufid; Haruhiko Ohashi; Anand Krishna Asundi, Editor(s)