
Proceedings Paper
Recent advances of the metrological AFM at INRIMFormat | Member Price | Non-Member Price |
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$17.00 | $21.00 |
Paper Abstract
Traceable dimensional measurements of step-height and lateral standards, patterned surfaces, and particles at
the nanoscale need of calibrated instruments such as the metrological AFMs. These instruments have onboard
capacitive sensors or interferometers to control the relative tip-sample movements. Interferometers
provide a direct traceability to the unit of length, at the cost of more complex set-ups. A new interferometer
set-up has been developed to monitor tip-sample z-displacements of the instrument in use at INRIM. The
interferometer is made of a compact and symmetric arrangement of the optics to fit available room and
minimize the metrology loop. Preliminary results are reported together with the analysis of the main error
sources of z-displacement measurements.
Paper Details
Date Published: 27 August 2014
PDF: 4 pages
Proc. SPIE 9173, Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors VIII, 917304 (27 August 2014); doi: 10.1117/12.2061954
Published in SPIE Proceedings Vol. 9173:
Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors VIII
Michael T. Postek, Editor(s)
PDF: 4 pages
Proc. SPIE 9173, Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors VIII, 917304 (27 August 2014); doi: 10.1117/12.2061954
Show Author Affiliations
R. Bellotti, Istituto Nazionale di Ricerca Metrologica (Italy)
G. B. Picotto, Istituto Nazionale di Ricerca Metrologica (Italy)
Published in SPIE Proceedings Vol. 9173:
Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors VIII
Michael T. Postek, Editor(s)
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