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Proceedings Paper

NanoXCT: development of a laboratory nano-CT system
Author(s): F. Nachtrab; M. Firsching; N. Uhlmann; C. Speier; P. Takman; T. Tuohimaa; C. Heinzl; J. Kastner; D. H. Larsson; A. Holmberg; G. Berti; M. Krumm; C. Sauerwein
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Paper Abstract

The NanoXCT project aims at developing a laboratory nano-CT system for non-destructive testing applications in the micro- and nano-technology sector. The system concept omits the use of X-ray optics, to be able to provide up to 1 mm FOV (at 285 nm voxel size) and down to 50 nm voxel size (at 0.175 mm FOV) while preserving the flexibility of stateof- the-art micro-CT systems. Within the project a suitable X-ray source, detector and manipulation system are being developed. To cover the demand for elemental analysis, the project will additionally include X-ray spectroscopic techniques. These will be reported elsewhere while this paper is focused on the imaging part of the project. We introduce the system concept including design goals and constraints, and the individual components. We present the current state of the prototype development including first results.

Paper Details

Date Published: 11 September 2014
PDF: 8 pages
Proc. SPIE 9212, Developments in X-Ray Tomography IX, 92120L (11 September 2014); doi: 10.1117/12.2061752
Show Author Affiliations
F. Nachtrab, Fraunhofer-Institut für Integrierte Schaltungen (IIS) (Germany)
M. Firsching, Fraunhofer-Institut für Integrierte Schaltungen (IIS) (Germany)
N. Uhlmann, Fraunhofer-Institut für Integrierte Schaltungen (IIS) (Germany)
C. Speier, Fraunhofer-Institut für Integrierte Schaltungen (IIS) (Germany)
P. Takman, Excillum AB (Sweden)
T. Tuohimaa, Excillum AB (Sweden)
C. Heinzl, Univ. of Applied Sciences Upper Austria (Austria)
J. Kastner, Univ. of Applied Sciences Upper Austria (Austria)
D. H. Larsson, KTH Royal Institute of Technology (Sweden)
A. Holmberg, KTH Royal Institute of Technology (Sweden)
G. Berti, XRD Tools (Italy)
M. Krumm, RayScan Technologies GmbH (Germany)
C. Sauerwein, RayScan Technologies GmbH (Germany)

Published in SPIE Proceedings Vol. 9212:
Developments in X-Ray Tomography IX
Stuart R. Stock, Editor(s)

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