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Proceedings Paper

Design of new window function of phase extraction algorithm in wavelength tuning Fizeau interferometer
Author(s): Yangjin Kim; Kenichi Hibino; Naohiko Sugita; Mamoru Mitsuishi
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Paper Abstract

For the surface shape measurement of a semiconductor with a highly reflective index, it is important to effectively suppress the harmonic signals from multiple reflections. In application, the phase extraction algorithm should have a maximum value when there is no phase-shift miscalibration. In this presentation, a new 4N - 3 phase extraction algorithm, which has the ability to suppress harmonic signals and exhibits a fringe contrast maximum value when there is no phaseshift error, was derived. This new 4N - 3 algorithm consists of a new polynomial window function and a discrete Fourier transform term and has the ability to compensate for 2nd-order nonlinearity in the phase shift. The suppression ability of the new polynomial window function is compared with other conventional window functions. The sampling functions of the new 4N - 3 algorithm have much smaller amplitudes in the vicinity of the detection frequency than does synchronous detection or other phase extraction algorithms with conventional window functions.

Paper Details

Date Published: 18 August 2014
PDF: 6 pages
Proc. SPIE 9203, Interferometry XVII: Techniques and Analysis, 92030Q (18 August 2014); doi: 10.1117/12.2061476
Show Author Affiliations
Yangjin Kim, The Univ. of Tokyo (Japan)
Kenichi Hibino, National Institute of Advanced Industrial Science and Technology (Japan)
Naohiko Sugita, The Univ. of Tokyo (Japan)
Mamoru Mitsuishi, The Univ. of Tokyo (Japan)

Published in SPIE Proceedings Vol. 9203:
Interferometry XVII: Techniques and Analysis
Katherine Creath; Jan Burke; Joanna Schmit, Editor(s)

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