
Proceedings Paper
Spurious mid-spatial frequency structure on optical surfaces reconstructed from surface slope measurementsFormat | Member Price | Non-Member Price |
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Paper Abstract
Mid-spatial frequency structure on an optical surface induces small-angle scatter in the transmitted wavefront. Freeform
surfaces are particularly susceptible to mid-spatial frequency errors due to the sub-aperture nature of the fabrication
processes. Several surface metrology methods that work for freeform surfaces use an indirect principle, reconstructing
the surface shape from measured surface slope data. The integration process in the presence of measurement noise adds a
spatial correlation to the dataset, leading to spurious spatial frequency structure. In this paper, we use the autocorrelation
function to characterize and evaluate this artificial mid-spatial frequency structure on optical surfaces that are
reconstructed by zonal integration methods.
Paper Details
Date Published: 18 August 2014
PDF: 7 pages
Proc. SPIE 9203, Interferometry XVII: Techniques and Analysis, 92030G (18 August 2014); doi: 10.1117/12.2061247
Published in SPIE Proceedings Vol. 9203:
Interferometry XVII: Techniques and Analysis
Katherine Creath; Jan Burke; Joanna Schmit, Editor(s)
PDF: 7 pages
Proc. SPIE 9203, Interferometry XVII: Techniques and Analysis, 92030G (18 August 2014); doi: 10.1117/12.2061247
Show Author Affiliations
Yue Dong, The Univ. of North Carolina at Charlotte (United States)
Zahra Hosseinimakarem, The Univ. of North Carolina at Charlotte (United States)
Zahra Hosseinimakarem, The Univ. of North Carolina at Charlotte (United States)
Angela Davies, The Univ. of North Carolina at Charlotte (United States)
Chris J. Evans, The Univ. of North Carolina at Charlotte (United States)
Chris J. Evans, The Univ. of North Carolina at Charlotte (United States)
Published in SPIE Proceedings Vol. 9203:
Interferometry XVII: Techniques and Analysis
Katherine Creath; Jan Burke; Joanna Schmit, Editor(s)
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